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Volume 13,     Number 4,     Winter 2005

 

SIMULATION METHODOLOGY OF
MICRO-ELECTRO-MECHANICAL SYSTEMS.
PART 1: FULL 3D-MODELS
ALEXANDRE A. SEROV

Abstract. The paper is dedicated to a state-of-the-art review of the numerical methods used in the simulation of Micro-Electro-Mechanical Systems (MEMS). We treat all the basic approaches that are used for the realization of modern methods of MEMS simulation. We also classify the numerical models in current use. We describe the basic methods used for full three-dimensional simulation of MEMS, and present examples of numerical models of MEMS. We present some prospects for development of systems components suggested by the simulation methods.

 

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© 2005, Canadian Applied Mathematics Quarterly (CAMQ)